منابع مشابه
Micro- and nanomechanical sensors for environmental, chemical, and biological detection.
Micro- and nanoelectromechanical systems, including cantilevers and other small scale structures, have been studied for sensor applications. Accurate sensing of gaseous or aqueous environments, chemical vapors, and biomolecules have been demonstrated using a variety of these devices that undergo static deflections or shifts in resonant frequency upon analyte binding. In particular, biological d...
متن کاملWaveguide micro-opto-electro-mechanical resonant chemical sensors.
We demonstrate a silicon micro-opto-electro-mechanical sensor based on mass-loading of a chemo-selective polymer coated onto a microbridge. The sensor is probed optically using an on-chip waveguide Fabry-Pérot interferometer for high resolution displacement and resonant frequency measurement. The mechanical resonator is designed with paddles to simplify chemo-selective polymer deposition and to...
متن کاملPolymeric Micro Sensors and Actuators
Sensors and actuators using polymeric systems, constitute one of the most promising fields of “smart polymers”, and it is becoming ever more important to associate artificial sensing and actuating systems with living organisms. Testing of some practical applications has now started in industry. The aim of this Special Issue is to develop a basic understanding of the field, its supporting techno...
متن کاملThermal Flow Micro Sensors'
A review is given on sensors fabricated by silicon micromachining technology using the thermal domain for the measurement of fluid flow. Attention is paid especially to performance and geometry of the sensors. Three basic types of thermal jlow sensors are discussed: anemometers, calorimetric flow sensors and time of flight flow sensors. Anemometers may comprise several heaters and temperature s...
متن کاملIntelligent Sensors Laboratory
The following pages describe our nature-inspired, or biomimetic, sonars. The biological features incorporated in our sonars include: 1. Binaural reception for accurate bearing determination. 2. Wide bandwidth pulses for object recognition. 3. Echo-controlled sensor mobility. 4. Separate transmitter and receivers for sensitivity of low-level echoes from close-by objects. 5. Nonlinear signal proc...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
ژورنال
عنوان ژورنال: IEEJ Transactions on Sensors and Micromachines
سال: 1998
ISSN: 1341-8939,1347-5525
DOI: 10.1541/ieejsmas.118.547